Products Description
AMAT 0010-27983 Electrostatic Chuck Heater
AMAT 0010-27983 is a 300mm MCA electrostatic chuck heater for Applied Materials semiconductor wafer processing chamber. It is embedded inside the ESC electrostatic chuck, delivering uniform thermal distribution to the wafer and maintaining precise setpoint temperature during plasma etch or deposition recipes.
This ceramic heating assembly supports closed-loop temperature control, equipped with built-in thermal sensors and over-temperature interlock protection. It is designed for high-vacuum cleanroom operation and low particle contamination. It is obsolete semiconductor spare part, supplied as surplus or refurbished units for legacy AMAT wafer equipment maintenance.
Main Specifications
| No. | Item | Parameter |
|---|---|---|
| 1 | Brand | AMAT (Applied Materials) |
| 2 | Model | 0010-27983, Electrostatic Chuck Heater |
| 3 | Module Type | 300mm MCA ESC Ceramic Heating Assembly |
| 4 | Application | AMAT Wafer Etch / Thin Film Deposition Vacuum Chamber |
| 5 | Power Rating | 500W |
| 6 | Temperature Range | 0 ~ 200℃ |
| 7 | Environment | Cleanroom, High vacuum, Low particle, ESD protected |
Core Functions
| No. | Function Description |
|---|---|
| 1 | Provide multi-zone uniform heating for 300mm wafer on electrostatic chuck |
| 2 | Work with thermal sensors to realize closed-loop precise wafer temperature control |
| 3 | Over-temperature interlock protection to prevent thermal damage to wafer and chuck |
| 4 | Maintain stable temperature to guarantee consistent etch/deposition process uniformity |
| 5 | Low-contamination ceramic heater compatible with high vacuum chamber environment |
Application Scenarios
| No. | Application |
|---|---|
| 1 | Semiconductor fab AMAT 300mm wafer plasma etching production tools |
| 2 | Thin film deposition vacuum chamber electrostatic chuck subsystem |
| 3 | High-precision cleanroom semiconductor manufacturing vacuum equipment |
| 4 | Semiconductor factory spare parts stock and chamber overhaul project |
| 5 | Legacy AMAT wafer processing tool maintenance and retrofit project |
FAQ
| No. | Question & Answer |
|---|---|
| 1 | Q:What is AMAT 0010-27983 Electrostatic Chuck Heater? A:It is a 300mm MCA ceramic heating assembly for AMAT ESC electrostatic chuck. It heats wafer evenly and precisely controls substrate temperature, which is critical to ensure uniform plasma etching and thin film deposition results in vacuum chamber. |
| 2 | Q:What handling requirements apply to this heater? A:Strict ESD protection must be applied. Avoid scratching ceramic surface to prevent particle generation. Installation and replacement must be performed inside cleanroom. |
| 3 | Q:Is AMAT 0010-27983 still in production? A:AMAT 0010-27983 Electrostatic Chuck Heater has been discontinued. Available stock is surplus or refurbished spare assembly for maintenance of legacy semiconductor wafer processing equipment. |
