Products Description
AMAT 0090-91763 Gas and Temp Chassis (SDS) Semiconductor Subsystem Chassis
AMAT 0090-91763 Gas and Temp Chassis (SDS) is a dedicated gas & temperature control chassis assembly for Applied Materials semiconductor wafer processing equipment. It integrates gas delivery modules, temperature monitoring boards and signal interface hardware, precisely regulating process gas flow and thermal conditions inside the wafer chamber.
This SDS chassis is built to cleanroom standards, with gas leak detection, over-temperature interlock and ESD protection. It communicates with the main equipment controller to maintain stable recipe parameters during deposition or etch cycles. It is obsolete semiconductor spare assembly, supplied as surplus or refurbished units for legacy AMAT wafer tool maintenance.
Main Specifications
| No. | Item | Parameter |
|---|---|---|
| 1 | Brand | AMAT (Applied Materials) |
| 2 | Model | 0090-91763, Gas and Temp Chassis (SDS) |
| 3 | Module Type | Gas & Temperature Control Chassis Assembly (SDS) |
| 4 | Application | AMAT Wafer Etch / Thin Film Deposition Process Chamber |
| 5 | Environment | Cleanroom, Vacuum compatible, ESD protected |
| 6 | Core Subsystems | Gas Flow Control, Temperature Sensing, Interlock Protection, Internal Bus |
| 7 | Operating Temperature | 10℃ ~ +40℃ (Cleanroom environment) |
Core Functions
| No. | Function Description |
|---|---|
| 1 | Monitor and control multiple process gas delivery paths for wafer fabrication |
| 2 | Real-time chamber temperature sampling and closed-loop thermal regulation |
| 3 | Gas leak detection and over-temperature hardware interlock for chamber safety |
| 4 | Transmit gas & temperature data and process commands to main equipment controller |
| 5 | Integrated ESD protection to safeguard sensitive gas and thermal sensing components |
Application Scenarios
| No. | Application |
|---|---|
| 1 | Semiconductor fab AMAT wafer etch and thin film deposition production tools |
| 2 | Process chamber gas distribution and thermal control subsystem |
| 3 | High-precision cleanroom semiconductor manufacturing automation equipment |
| 4 | Semiconductor factory spare parts stock and equipment overhaul project |
| 5 | Legacy AMAT wafer processing tool maintenance and retrofit project |
FAQ
| No. | Question & Answer |
|---|---|
| 1 | Q:What is AMAT 0090-91763 Gas and Temp Chassis (SDS)? A:It is Applied Materials integrated chassis assembly for gas delivery and temperature monitoring. It controls process gas flow and chamber thermal status, sends real-time data to main controller to guarantee stable wafer process recipes in cleanroom. |
| 2 | Q:What handling requirements apply to this chassis? A:ESD protective measures are mandatory during disassembly and installation. It must be operated in cleanroom environment and cannot be deployed in ordinary industrial workshops. |
| 3 | Q:Is AMAT 0090-91763 still in production? A:AMAT 0090-91763 Gas and Temp Chassis (SDS) has been discontinued. Available stock is surplus or refurbished spare assembly for maintenance of legacy semiconductor wafer processing equipment. |
